| Place of Origin: | China |
|---|---|
| Brand Name: | Newradar Gas |
| Certification: | ISO/DOT/GB |
| Model Number: | N/A |
| Minimum Order Quantity: | 1 pcs |
| Price: | negotiation |
| Packaging Details: | Packed in 10L-500L cylinder or packed according to the demands. |
| Delivery Time: | 10-20 working days after received your payment |
| Payment Terms: | L/C, , T/T, Western Union, MoneyGram |
| Supply Ability: | 1000 pcs per month |
| Product Name: | Nitrogen Trifluoride | Density: | 3.003 Kg/m3 (1 Atm, 15 °C) |
|---|---|---|---|
| Odor: | Moldy | Appearance: | Colourless Gas |
| CAS No.: | 7783-54-2 | EINECS No.: | 232-007-1 |
| Grade: | Agriculture Grade, Electron Grade | Solubility In Water: | 0.021 G/100 ML |
| High Light: | electric gas,electron gas |
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Nitrogen Trifluoride NF3 , 99.99~99.999% , Used In semiconductor
Description:
The nitrogen trifluoride is a colorless, odorless, nonflammable gas. Elemental fluorine has been introduced as an environmentally friendly replacement for nitrogen trifluoride in the manufacture of flat-panel displays and thin-film solar cells.
Nitrogen trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. It is preferred to fluorine gas due to its convenient handling properties, reflecting its considerable stability.
It is compatible with steel and Monel, as well as several plastics.
Specifications:
1. Physical properties
| Product Name | Nitrogen Trifluoride |
| Molecular Formula | NF3 |
| UN No. | UN 2451 |
| CAS No. | 7783-54-2 |
| EINECS No. | 232-007-1 |
2. Typical technical data
| Item | Unit | Index | |
| NF3 | Vol.% ≥ | 99.995 | 99.99 |
| CF4 | Vol.% ≤ | ≤20 | ≤40 |
| N2 | Vol.% ≤ | ≤5 | ≤10 |
| O2+Ar | Vol.% ≤ | ≤3 | ≤5 |
| CO | Vol.% ≤ | ≤1 | ≤5 |
| CO2 | Vol.% ≤ | ≤1 | ≤5 |
| N2O | Vol.% ≤ | ≤1 | ≤5 |
| SF6 | Vol.% ≤ | ≤2 | ≤5 |
| H2O | Vol.% ≤ | ≤3 | ≤1 |
3. Package
DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder
| Cylinders Information | Individual Cylinder(47L) | Bundle | Y Cylinder | ISO Tube |
| Material | Mn Steel(316L) | Cr-Mo Steel | ||
| Valve Connection Type | CGA 330 CGS/DISS 640 | DISS 640 etc | ||
| Type | DOT-3AA GB5099 | 47L*16/47L*25 | 20ft:40ft | |
| Pressure | 9-13Mpa | |||
| Filling Weight | 20/22.7kg | 195/200 |
Applications:
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.
